Mechanical properties of Al-Cu-Fe thin films

Vacuum

Volumn 80, Issue 1-3, 2005, Pages 137-140

  Cekada M ^a   Dolinsek J ^a   Panjan, P ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

AlCuFe; Microhardness; Scratch test; Sputtering; Thin films

Indexed keywords

ALUMINUM COMPOUNDS; MICROHARDNESS; MULTILAYERS; SPUTTERING; STAINLESS STEEL; SUBSTRATES; VICKERS HARDNESS TESTING;

ALCUFE; HOMOGENIZATION; SCRATCH TEST;

THIN FILMS;

EID: 25644444492     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.07.024     Document Type: Conference Paper

References (6)

1. C.I. Lang, D.J. Sordelet, M.F. Besser, D. Shechtman, F.S. Biancaniello, and E.J. Gonzalez J Mater Res 15 9 2000 1894 1904
2. A. Haugeneder, T. Eisenhammer, A. Mahr, J. Schneider, and M. Wendel Thin Solid Films 307 1997 120 125
3. S. Bonasso, P. Pigeat, D. Rouxel, and B. Weber Thin Solid Films 409 2002 165 171
4. T. Grenet, F. Giroud, J.L. Joulaud, and M. Capitan Phil Mag A 82 16 2002 2909 2922
5. M. Čekada, P. Panjan, D. Jurić, J. Dolinšek, and A. Zalar Thin Solid Films 459 2004 267 270
6. R. Haberkern, K. Khedhri, C. Madel, and P. Häussler Mat Sci Eng A 294-296 2000 475 480