X-ray microscopy for NDE of micro- And nano-structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5766, Issue , 2005, Pages 40-48

  Wang, Steve ^a   Duewer, Frederick ^a   Feser, Michael ^a   Scott, David ^a   Yun, Wenbing ^a  

^a XRADIA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPY; IMAGING SYSTEMS; NONDESTRUCTIVE EXAMINATION; OPTICAL MICROSCOPY; RADIATION DAMAGE; X RAYS;

MATERIAL ANALYSIS; PENETRATION DEPTH; VISIBLE LIGHT MICROSCOPY; X-RAY IMAGING;

NANOSTRUCTURED MATERIALS;

EID: 25644434154     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601370     Document Type: Conference Paper

References (13)

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