Laser local oxidation of porous silicon: A FTIR spectroscopy investigation

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1658-1661

  Rocchia, M ^a   Rossi, A M ^a   Borini, S ^a   Boarino, L ^a   Amato, G ^a  

^a ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREE OF OXIDATION; FOCUSED LASER BEAMS; LASER POWDERS; PHASE CHANGE;

FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER BEAM EFFECTS; OXIDATION; POROUS SILICON; POWDERS; THERMAL CONDUCTIVITY;

LASER BEAMS;

EID: 25444508959     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461213     Document Type: Conference Paper

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