Chemical vapour etching of silicon and porous silicon: Silicon solar cells and micromachining applications

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1606-1610

  Ben Jaballah, A ^a   Hassen, M ^a   Hajji, M ^a   Saadoun, M ^a   Bessais, B ^a   Ezzaouia, H ^a  

^a Institut National de Recherche Scientifique et Technique Tunis   (Tunisia)

Author keywords

[No Author keywords available]

Indexed keywords

GROOVING; MASKING FILMS;

CHEMICAL VAPOR DEPOSITION; ETCHING; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

POROUS SILICON;

EID: 25444502365     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461197     Document Type: Conference Paper

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