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Volumn 123, Issue 1-2, 2002, Pages 7-10
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Improvement of transport parameters in solar grade monocrystalline silicon by application of a sacrificial porous silicon layer
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Author keywords
A. Gettering; Porous Silicon; Silicon
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Indexed keywords
CARRIER CONCENTRATION;
CRYSTALLINE MATERIALS;
DIFFUSION;
ELECTRON TRANSPORT PROPERTIES;
HALL EFFECT;
HEAT TREATMENT;
INTEGRATED CIRCUIT MANUFACTURE;
POROUS SILICON;
MONOCRYSTALLINE SILICON;
SILICON WAFERS;
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EID: 0036638651
PISSN: 00381098
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1098(02)00206-5 Document Type: Article |
Times cited : (42)
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References (6)
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