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Volumn 123, Issue 1-2, 2002, Pages 7-10

Improvement of transport parameters in solar grade monocrystalline silicon by application of a sacrificial porous silicon layer

Author keywords

A. Gettering; Porous Silicon; Silicon

Indexed keywords

CARRIER CONCENTRATION; CRYSTALLINE MATERIALS; DIFFUSION; ELECTRON TRANSPORT PROPERTIES; HALL EFFECT; HEAT TREATMENT; INTEGRATED CIRCUIT MANUFACTURE; POROUS SILICON;

EID: 0036638651     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(02)00206-5     Document Type: Article
Times cited : (42)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.