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Volumn 584, Issue 1, 2005, Pages 34-37
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Optimized sub-40 nm planar patterning process for a La0.7Sr 0.3MnO3 magnetic memory
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Author keywords
Manganite; MRAM; Nanolithography; Spintronics
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Indexed keywords
ETCHING;
LANTHANUM COMPOUNDS;
LITHOGRAPHY;
OPTIMIZATION;
MANGANITE;
NRAM;
SPINTRONICS;
NANOTECHNOLOGY;
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EID: 25444478097
PISSN: 15726657
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jelechem.2004.02.021 Document Type: Conference Paper |
Times cited : (2)
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References (9)
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