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Volumn 34, Issue 2, 1998, Pages 132-136

Thermodynamic Modeling of Boron Nitride Chemical Vapor Deposition in the B-N-H-He System1

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EID: 2542597795     PISSN: 00201685     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (6)

References (17)
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  • 2
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  • 3
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    • Chemical Vapour Deposition of Thin Films of BN onto Fused Silica and Sapphire
    • Sano, M. and Aoki, M., Chemical Vapour Deposition of Thin Films of BN onto Fused Silica and Sapphire. Thin Solid Films. 1981. vol. 83. no. 2, pp. 247-251.
    • (1981) Thin Solid Films , vol.83 , Issue.2 , pp. 247-251
    • Sano, M.1    Aoki, M.2
  • 4
    • 0040711715 scopus 로고
    • Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition
    • Nakamura, K., Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition, Mater. Sci. Forum, 1990, vol. 54/55, pp. 111-140.
    • (1990) Mater. Sci. Forum , vol.54-55 , pp. 111-140
    • Nakamura, K.1
  • 5
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    • Reflectance Spectra of BN Materials in the Vacuum Ultraviolet
    • Chayahara, A., Yokoyama, H., Imura, T., et al., Reflectance Spectra of BN Materials in the Vacuum Ultraviolet, Jpn. J. Appl. Phys., 1988, vol. 27, no. 3, pp. 440-441.
    • (1988) Jpn. J. Appl. Phys. , vol.27 , Issue.3 , pp. 440-441
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  • 6
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    • x:H Dielectric Layers Prepared by Field-assisted Plasma-enhanced Chemical Vapor Deposition
    • x:H Dielectric Layers Prepared by Field-assisted Plasma-enhanced Chemical Vapor Deposition, Neorg. Mater., 1995, vol. 31, no. 12. pp. 1541-1544.
    • (1995) Neorg. Mater. , vol.31 , Issue.12 , pp. 1541-1544
    • Sal'man, E.G.1    Kosinova, M.L.2    Korshunov, A.N.3
  • 8
    • 0003900244 scopus 로고
    • Plasma Deposition of BN. BCN:H, and Me-BCN:H Films Using N-Trimethylborazine (Me = T1, Nb)
    • Weber, A., Bringamann, U., Klages, C.P., et al. Plasma Deposition of BN. BCN:H, and Me-BCN:H Films Using N-Trimethylborazine (Me = T1, Nb), J. Phys. C: Solid State Phys., 1992, vol. 2, no. 8, pp. 1391-1398.
    • (1992) J. Phys. C: Solid State Phys. , vol.2 , Issue.8 , pp. 1391-1398
    • Weber, A.1    Bringamann, U.2    Klages, C.P.3
  • 10
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    • Thermodynamic Analysis of the Refining of Technical Boron Nitride
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    • (1988) J. Mater. Sci. , vol.23 , pp. 3594-3599
    • Leitner, J.1    Vonka, P.2    Brozek, V.3    Hubacek, M.4
  • 11
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    • 4)-(BN) Coatings
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  • 12
    • 0039353383 scopus 로고
    • Enthalpy of Formation of Wurtzite-Structure Boron Nitirde
    • Leonidov, V.Ya., Timofeev, I.V., Lazarev, V.B., and Bochko, A.V., Enthalpy of Formation of Wurtzite-Structure Boron Nitirde, Zh. Neorg. Khim., 1988, vol. 33, no. 6, pp. 1597-1600.
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    • Growth of Cubic Boron Nitride by Chemical Vapor Deposition and High-Pressure High-Temperature Synthesis
    • Demazeau, G., Growth of Cubic Boron Nitride by Chemical Vapor Deposition and High-Pressure High-Temperature Synthesis, Diamond Relat. Mater., 1993, vol. 2, nos. 2-4, pp. 197-200.
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    • Demazeau, G.1
  • 15
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    • Thermodynamics of the Graphite-like-Cubic Phase Transition in Boron Nitride
    • Solozhenko, V.L. and Leonidov, V.Ya., Thermodynamics of the Graphite-like-Cubic Phase Transition in Boron Nitride, Zh. Fiz. Khim., 1988, vol. 62, no. 11, pp. 3145-3146.
    • (1988) Zh. Fiz. Khim. , vol.62 , Issue.11 , pp. 3145-3146
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  • 16
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    • On Thermodynamic Equilibria of the Solid BN and Gas Phases in B-N-H-Cl-He System
    • in press
    • Golubenko, A.N., Kosinova, M.L., Titov, V.A., et al., On Thermodynamic Equilibria of the Solid BN and Gas Phases in B-N-H-Cl-He System, Thin Solid Films (in press).
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.