Transducer and protective PVD-films for applications in microsystem components

Microsystem Technologies

Volumn 5, Issue 1, 1998, Pages 49-58

  Quandt, E ^a   Holleck, H ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2542580116     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050140     Document Type: Article

References (25)

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