Fabrication of monolithic bidirectional switch devices

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 463-467

  Baus, M ^a   Lemme, M C ^b   Chmielus, St ^c   Sittig, R ^c   Spangenberg, B ^a   Kurz, H ^b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b AMO GMBH   (Germany)

^c TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Bidirectional switch; LOCOS; Power device; Side gate; Silicon

Indexed keywords

CAPACITORS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ENERGY DISSIPATION; FABRICATION; INTEGRATION; OXIDATION; SWITCHING;

BIDIRECTIONAL SWITCH; LOCOS; POWER DEVICES; SIDE GATE;

MICROELECTROMECHANICAL DEVICES;

EID: 2542466316     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00194-7     Document Type: Conference Paper

References (3)

1. Sittig R., Heinke F. Solid-State Electron. 44:2000;1387-1392.
2. Heinke F., Sittig R. Solid-State Electron. 44:2000;1393-1398.
3. Amemiya Y., Sugeta T., Mizushima Y. IEEE Trans. Electron. Dev. ED-29:1981;236-243.