Particle detection using an integrated capacitance sensor

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 74-79

  York, T A ^a   Evans, I G ^a   Pokusevski, Z ^a   Dyakowski, T ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Capacitance sensor; Integrated particle detector; Tomography

Indexed keywords

CAPACITANCE MEASUREMENT; CMOS INTEGRATED CIRCUITS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; IMAGE ANALYSIS; INTEGRATED CIRCUIT LAYOUT; PARTICLE DETECTORS; PARTICLE SIZE ANALYSIS; SURFACE ROUGHNESS; TOMOGRAPHY;

CAPACITANCE CHANGES; DYNAMIC TESTS; INTEGRATED CAPACITANCE SENSOR; STATIC TESTS;

SENSORS;

EID: 0035426145     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00542-8     Document Type: Article

References (4)

1. Particle image velocimetry: A review
2. An on-chip, interconnect capacitance characterization method with sub-femtofarad resolution
3. A sensing circuit for micro-capacitance tomography
4. Process tomography: A European innovation and its application