Structural characterization of a lamellar W/Si multilayer grating

Journal of Applied Physics

Volumn 85, Issue 2, 1999, Pages 1225-1227

  Jergel, M ^a   Mikulik P ^a,d   Majkova E ^a   Luby, S ^a   Senderak R ^a   Pincik E ^a   Brunel, M ^b   Hudek, P ^c   Kostic I ^c   Konecnikova A ^c  

^a INSTITUTE OF PHYSICS   (Slovakia)

^b LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^c INSTITUTE OF CHEMISTRY   (Slovakia)

^d MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2542432399     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369346     Document Type: Article

References (10)

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