Plasma analysis using the MIEDA system;Plasmaanalyse mit dem MIEDA-System

Galvanotechnik

Volumn 95, Issue 5, 2004, Pages 1254-1256+VII

  Strauss, Von Georg N ^a   Stärz, Ronald ^b   Pulker, Hans K ^b   Kaiser, Norbert ^c  

^a Phystech Consulting   (Austria)

^b UNIVERSITY OF INNSBRUCK   (Austria)

^c FRAUNHOFER GESELLSCHAFT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COATINGS; DEPOSITION; KINETIC ENERGY; VOLTAGE MEASUREMENT;

HARD COATINGS; IONIC CURRENTS; MULTICHANNEL ION ENERGY DISTRIBUTION ANALYZER (MIEDA); PLASMA DEPOSITION;

PLASMAS;

EID: 2542425426     PISSN: 00164232     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

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