Fabrication concept for a CMOS-compatible electrostatically driven surface MEMS switch for RF applications

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 468-473

  Harms, K U ^a   Horstmann, J T ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

CMOS; Microelectromechanical systems; RF switch; Surface MEMS

Indexed keywords

CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SWITCHES; VOLTAGE CONTROL;

MICROELECTROMECHANICAL SYSTEMS; RF SWITCHES; SURFACE MEMS;

MICROELECTRONICS;

EID: 2542420983     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00195-9     Document Type: Conference Paper

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