Model-based verification for first time right manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5756, Issue , 2005, Pages 198-207

  Bruce, James A ^a   Conrad, Edward W ^a   Dick, Gregory J ^a   Nickel, D John ^a   Smolinski, Jacek G ^a  

^a NONE

Author keywords

OPC; Optical Proximity Correction; Simulation; Verification

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; DATA REDUCTION; LITHOGRAPHY; MATHEMATICAL MODELS; PRODUCT DESIGN;

CHIP DESIGN; DATA MANAGEMENT; OPTICAL PROXIMITY CORRECTION (OPC); VERIFICATION;

OPTICAL SYSTEMS;

EID: 25144499546     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600552     Document Type: Conference Paper

References (7)

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