Performance and system-on-chip integration of an unmodified CMOS ISFET

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 254-258

  Hammond, P A ^a   Cumming, D R S ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

CMOS; Drift; ISFET; System on chip

Indexed keywords

DIFFUSION; HYDROGEN; ION SENSITIVE FIELD EFFECT TRANSISTORS; IONS; PASSIVATION; PH METERS; THRESHOLD VOLTAGE;

DRIFT; HYDROGEN IONS; SYSTEM-ON-CHIP;

CMOS INTEGRATED CIRCUITS;

EID: 25144467509     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.12.065     Document Type: Conference Paper

References (10)

1. P. Bergveld Development of an ion-sensitive solid-state device for neurophysiological measurements IEEE Trans. Biomed. Eng. 1970 70 71
2. J. Bausells, J. Carrabina, A. Errachid, and A. Merlos Ion-sensitive field-effect transistors fabricated in a commercial CMOS technology Sens. Actuators B 57 1999 56 61
3. T. Matsuo, and M. Esashi Methods of ISFET fabrication Sens. Actuators 1 1981 77 96
4. P. Hammond, D. Ali, D. Cumming, Design of a single-chip pH sensor using a conventional 0.6 μ CMOS process, IEEE Sens. J. 4(6) (2004) 706-712
5. L. Ravezzi, and P. Conci ISFET sensor coupled with CMOS read-out circuit microsystem IEE Electron. Lett. 34 23 1998 2234 2235
6. P. Hammond, and D. Cumming Encapsulation of a liquid-sensing microchip using SU-8 photoresist Microelectron. Eng. 73-74 2004 893 897
7. S. Jamasb, S. Collins, and R. Smith A physical model for drift in pH ISFETs Sens. Actuators B 49 1998 146 155
8. M. Esashi, and T. Matsuo Integrated micro multi ion sensor using field effect of semiconductor IEEE Trans. Biomed. Eng. 25 1978 184 191
9. J. Kakalios, R. Street, and W. Jackson Stretched-exponential relaxation arising from dispersive diffusion of hydrogen in amorphous silicon Phys. Rev. Lett. 59 9 1987 1037 1040
10. A. Errachid, J. Bausells, N. Jaffrezic-Renault, A simple REFET for pH detection in differential mode, Sens. Actuators B 60 (1999) 43-48