Hopkins equation in Hilbert space and its application in polarized illumination modeling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5754, Issue PART 2, 2005, Pages 953-960

  Lei, Junjiang ^a   Bai, Min ^a   Shiely, Jim ^a   Zhang, Lin ^a  

^a SYNOPSYS INC   (United States)

Author keywords

Polarized illumination; Thin film stack; Vector model

Indexed keywords

POLARIZED ILLUMINATION; THIN FILM STACK; VECTOR MODEL; WAFER PRINTABILITY;

COMPUTER SIMULATION; LIGHT POLARIZATION; PHOTOLITHOGRAPHY; SIMULATORS; THIN FILMS; VECTORS;

LIGHTING;

EID: 25144453252     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601196     Document Type: Conference Paper

References (11)

1. Min Bai, J. Lei, J. Shiely, L. Zhang, Simulations of immersion lithography, SPIE 2005.
2. th ed., Pergamon, Oxford (1999).
3. P.L. Butzer, J.R. Higgins, and R.L. Stens, Sampling theory of signal theory In: Development of Mathematics 1950 - 2000 (J.-P. Pier, ed.), Birkhauser Verlag, Basel, 2000, 193-234
4. C. Carmeli, E. De Vito, A. Toigo, Reproducing kernel Hilbert spaces and Mercer theorem, preprint (2005)
5. D. G. Flagello et al., "Theory of high-NA imaging in homogeneous thin films," J. Opt. Soc. Am. A, Vol. 13, No. 1, p53-64 (1996).
6. H. Hochstadt, Integral equations, John Wiley & Sons Inc., New York, 1989
7. H. H. Hopkins, The concept of partial coherence in optice, Proc. Roy. Soc., Vol. A208, pp.263-277 (1951)
8. J.Lei, W.E.Cheney and R.Jia, Approximation from shift invariant spaces by integral operators, SIAM Journal of Mathematical Analysis, Vol.28 (1997) 481-498
9. J.Lei and P.Butzer, Approximation of signals using measured sampled values, Commun. Appl. Anal., 4 (2000), No.2, 245-255
10. M. Mansuripur, "Distribution of light at and near the focus of high-numerical-aperture objectives," J. Opt. Soc. Am. A, Vol. 3, No. 12, p2086-2093 (1986)
11. M. Yeung, Modeling high numerical aperture optical lithography, Proc. SPIE, vol.922, 149-167 (1988)