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Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 254-257
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Modification of electrode materials for plasma torches
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Author keywords
Ion implantation; Plasma torches; Work function
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Indexed keywords
CHEMICAL MODIFICATION;
COMPOSITION;
DEPOSITION;
ELECTRODES;
ION IMPLANTATION;
METALLIC FILMS;
PLASMA TORCHES;
POLYCRYSTALLINE MATERIALS;
SILICON WAFERS;
SURFACE PROPERTIES;
COPPER THIN FILM SUBSTRATES;
ELECTRODE MATERIALS;
ELECTRON BEAM TECHNIQUE;
WORK FUNCTION;
COPPER;
ION IMPLANTATION;
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EID: 24644495675
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.015 Document Type: Article |
Times cited : (3)
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References (10)
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