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Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 254-257

Modification of electrode materials for plasma torches

Author keywords

Ion implantation; Plasma torches; Work function

Indexed keywords

CHEMICAL MODIFICATION; COMPOSITION; DEPOSITION; ELECTRODES; ION IMPLANTATION; METALLIC FILMS; PLASMA TORCHES; POLYCRYSTALLINE MATERIALS; SILICON WAFERS; SURFACE PROPERTIES;

EID: 24644495675     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.015     Document Type: Article
Times cited : (3)

References (10)
  • 10
    • 84883176383 scopus 로고    scopus 로고
    • 78th ed
    • CRC handbook 78th ed. 1997-1998
    • (1997) CRC Handbook


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.