Ion implantation for plasma torches

Vacuum

Volumn 65, Issue 3-4, 2002, Pages 547-553

  Jankov, I R ^a   Goldman, I D ^a   Szente, R N ^b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b Instituto de Pesquisas Tecnologicas   (Brazil)

Author keywords

Electrode erosion; Ion implantation; Plasma torch; Work function

Indexed keywords

CATHODES; COMPOSITION; COMPUTER SIMULATION; ELECTRODES; EROSION; ION IMPLANTATION; POSITIVE IONS; SURFACE STRUCTURE;

ELECTRODE EROSION;

PLASMA TORCHES;

EID: 0037182061     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00470-5     Document Type: Conference Paper

References (7)