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Volumn 5751, Issue II, 2005, Pages 798-807
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Dynamics of a laser produced plasma for soft X-ray production
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Author keywords
Conversion Efficiency; Debris Generation; Modeling; Plasma Formation; X ray Generation
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Indexed keywords
CARBON;
COMPUTER SIMULATION;
LITHOGRAPHY;
NITROGEN;
SEMICONDUCTOR MATERIALS;
ULTRAVIOLET RADIATION;
X RAYS;
CONVERSION EFFICIENCY;
DEBRIS GENERATION;
PLASMA FORMATION;
X-RAY GENERATION;
LASER PRODUCED PLASMAS;
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EID: 24644489629
PISSN: 16057422
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.598543 Document Type: Conference Paper |
Times cited : (4)
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References (8)
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