Dynamics of a laser produced plasma for soft X-ray production

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue II, 2005, Pages 798-807

  Spencer, Joshua B ^a   Alman, Darren A ^a   Ruzic, David N ^a   Jurczyk, Brian E ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Conversion Efficiency; Debris Generation; Modeling; Plasma Formation; X ray Generation

Indexed keywords

CARBON; COMPUTER SIMULATION; LITHOGRAPHY; NITROGEN; SEMICONDUCTOR MATERIALS; ULTRAVIOLET RADIATION; X RAYS;

CONVERSION EFFICIENCY; DEBRIS GENERATION; PLASMA FORMATION; X-RAY GENERATION;

LASER PRODUCED PLASMAS;

EID: 24644489629     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.598543     Document Type: Conference Paper

References (8)

1. Turcu, I. C. E., and J. B. Dance. X-Rays from Laser Plasmas: Generation and Applications. John Wiley & Sons, Chichester, New York:, 1999.
2. Spitzer, R. C., et al. "Conversion Efficiencies from Laser-Produced Plasmas in the Extreme Ultraviolet Regime," Journal of Applied Physics 79.5,2251-58, 1996.
3. Attwood, David T. Soft X-Rays and Extreme Ultraviolet Radiation : Principles and Applications. Cambridge University Press, Cambridge, New York: Cambridge University Press, 2000.
4. Silfvast, W. T., et al, "Laser-Produced Plasmas for Soft-X-Ray Projection Lithography," Journal of Vacuum Science & Technology B, 10.6, 3126-33, 1992.
5. Fiedorowicz, H, "Investigation of Soft X-Ray Emission in the 'Water Window' for Microscopy Using a Double-Stream Gas Puff Target Irradiated with the Prague Asterix Laser System (Pals)." http://www.ifpilm.waw.pl/Plasma2001/ Prace1/O4.2.PDF
6. Banine, V. Y., J. P. H. Benschop, and H. G. C. Werij. "Comparison of Extreme Ultraviolet Sources for Lithography Applications," Microelectronic Engineering, 53.1-4, 681-84, 2000.
7. Eisberg, Robert Martin, and Robert Resnick, Quantum Physics of Atoms, Molecules, Solids, Nuclei, and Particles, 2nd ed., John Wiley & Sons, New York, 1985.
8. Mora, P, "Plasma Expansion into a Vacuum." Physical Review Letters, 90.18, 2003.