메뉴 건너뛰기




Volumn 5751, Issue II, 2005, Pages 798-807

Dynamics of a laser produced plasma for soft X-ray production

Author keywords

Conversion Efficiency; Debris Generation; Modeling; Plasma Formation; X ray Generation

Indexed keywords

CARBON; COMPUTER SIMULATION; LITHOGRAPHY; NITROGEN; SEMICONDUCTOR MATERIALS; ULTRAVIOLET RADIATION; X RAYS;

EID: 24644489629     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.598543     Document Type: Conference Paper
Times cited : (4)

References (8)
  • 2
    • 0030107465 scopus 로고    scopus 로고
    • Conversion efficiencies from laser-produced plasmas in the extreme ultraviolet regime
    • 79.5
    • Spitzer, R. C., et al. "Conversion Efficiencies from Laser-Produced Plasmas in the Extreme Ultraviolet Regime," Journal of Applied Physics 79.5,2251-58, 1996.
    • (1996) Journal of Applied Physics , pp. 2251-2258
    • Spitzer, R.C.1
  • 4
    • 0000268620 scopus 로고
    • Laser-produced plasmas for soft-X-ray projection lithography
    • 10.6
    • Silfvast, W. T., et al, "Laser-Produced Plasmas for Soft-X-Ray Projection Lithography," Journal of Vacuum Science & Technology B, 10.6, 3126-33, 1992.
    • (1992) Journal of Vacuum Science & Technology B , pp. 3126-3133
    • Silfvast, W.T.1
  • 6
    • 0034206989 scopus 로고    scopus 로고
    • Comparison of extreme ultraviolet sources for lithography applications
    • 53.1-4
    • Banine, V. Y., J. P. H. Benschop, and H. G. C. Werij. "Comparison of Extreme Ultraviolet Sources for Lithography Applications," Microelectronic Engineering, 53.1-4, 681-84, 2000.
    • (2000) Microelectronic Engineering , pp. 681-684
    • Banine, V.Y.1    Benschop, J.P.H.2    Werij, H.G.C.3
  • 8
    • 0038271883 scopus 로고    scopus 로고
    • Plasma expansion into a vacuum
    • 90.18
    • Mora, P, "Plasma Expansion into a Vacuum." Physical Review Letters, 90.18, 2003.
    • (2003) Physical Review Letters
    • Mora, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.