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Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 435-439
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Properties of nano-multilayered hard coatings deposited by a new hybrid coating process: Combined cathodic arc and unbalanced magnetron sputtering
a
a
KOBE STEEL LTD
(Japan)
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Author keywords
Cathodic arc; Cutting performance; Hybrid coating process; Nano multilayer; Unbalanced magnetron sputtering
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Indexed keywords
CUTTING;
EVAPORATION;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
MULTILAYERS;
NANOSTRUCTURED MATERIALS;
SPUTTER DEPOSITION;
STRUCTURE (COMPOSITION);
TRANSMISSION ELECTRON MICROSCOPY;
TRIBOLOGY;
X RAY DIFFRACTION ANALYSIS;
CATHODIC ARC;
CUTTING PERFORMANCE;
EVAPORATION RATE;
HYBRID COATING PROCESS;
NANO-MULTILAYERED HARD COATINGS;
UNBALANCED MAGNETRON SPUTTERING;
PROTECTIVE COATINGS;
SPUTTERING;
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EID: 24644486502
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.175 Document Type: Article |
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Times cited : (37)
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References (17)
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