Surface enhancement by shallow carbon implantation for improved adhesion of diamond-like coatings

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 813-817

  Campbell, Albert B ^a  

^a GENERAL MOTORS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644476586     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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