Characterization of a very low power argon CCP

Journal of Analytical Atomic Spectrometry

Volumn 20, Issue 9, 2005, Pages 966-973

  Anghel, Sorin D ^a   Simon, Alpar ^a   Frentiu, Tiberiu ^a  

^a BABE BOLYAI UNIVERSITY   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; CAPACITANCE; ELECTRIC RESISTANCE; ELECTRODES; FUNCTIONS; IONIZATION; OSCILLATIONS; PARAMETER ESTIMATION; SAMPLING; WAVEFORM ANALYSIS;

CAPACITIVELY COUPLED PLASMA (CCP); CONDUCTING ELECTRODES; ELECTRIC MODELS; HIGH ORDER HARMONICS;

PLASMAS;

EID: 24644453077     PISSN: 02679477     EISSN: 13645544     Source Type: Journal    
DOI: 10.1039/b502818c     Document Type: Article

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