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Volumn 30, Issue 2 I, 2002, Pages 660-664
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Generation of a low-power capacitively coupled plasma at atmospheric pressure
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Author keywords
Atmospheric pressure capacitively coupled plasma; Plasma torch
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Indexed keywords
ARGON;
ATMOSPHERIC PRESSURE;
ATOMIZATION;
ELECTRIC GENERATORS;
ELECTRIC POTENTIAL;
OSCILLATORS (ELECTRONIC);
PLASMA TORCHES;
RESONANT CIRCUITS;
SPURIOUS SIGNAL NOISE;
CAPACITIVELY COUPLED PLASMAS;
PLASMA RESISTANCE;
PLASMA THEORY;
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EID: 0036545325
PISSN: 00933813
EISSN: None
Source Type: Journal
DOI: 10.1109/TPS.2002.1024265 Document Type: Review |
Times cited : (18)
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References (19)
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