Structure and chemical composition of polymer films deposited in a dielectric barrier discharge (DBD) in Ar/fluorocarbon mixtures

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 660-663

  Vinogradov, I P ^a   Lunk, A ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

DBD; Fluorocarbon polymer films; FTIR absorption spectroscopy; XPS

Indexed keywords

ABSORPTION SPECTROSCOPY; ATMOSPHERIC PRESSURE; COMPOSITION; DEPOSITION; DIELECTRIC MATERIALS; FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MIXTURES; MOLECULAR STRUCTURE; PLASTIC FILMS; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIELECTRIC BARRIER DISCHARGE (DBD); FLUOROCARBON POLYMER FILMS;

ORGANIC POLYMERS;

FILM;

EID: 24644442731     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.01.084     Document Type: Article

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