Preparation of ultra-thin carbon overcoat for magnetic recording medium by filtered cathodic vacuum arc technology

Vacuum

Volumn 74, Issue 3-4 SPEC. ISS., 2004, Pages 711-716

  Fujimaki, S ^a   Yatsue, T ^a   Kokaku, Y ^a   Ohno, T ^a   Kanbe, T ^a  

^a SAN JOSE RESEARCH CENTER   (United States)

Author keywords

Carbon overcoat; Cathodic arc; Magnetic recording media; Ta C

Indexed keywords

CARBON; COATING TECHNIQUES; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM PREPARATION; IONS; MAGNETIC FILMS; MAGNETIC RECORDING; MAGNETORESISTANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION;

CARBON OVERCOAT; CATHODIC ARC; FILTERED CATHODIC VACUUM ARC (FCVA) SYSTEM; MAGNETIC RECORDING MEDIA; ULTRA-THIN COATING;

VACUUM TECHNOLOGY;

EID: 2442566437     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.054     Document Type: Article

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