Characteristics of induced current due to laser plasma and its application to laser processing monitoring

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 3, 2004, Pages 1018-1027

  Madjid, Syahrun Nur ^a   Kitazima, Iwao ^a   Kobayashi, Takao ^a   Lee, Yong Inn ^b   Kagawa, Kiichiro ^a  

^a UNIVERSITY OF FUKUI   (Japan)

^b Chonbuk National University   (South Korea)

Author keywords

Induced current signal; Laser processing monitoring; Microgas plasma; Moment penetration indicator; Precise focus indicator; Target plasma

Indexed keywords

ATMOSPHERIC PRESSURE; CATHODE RAY OSCILLOSCOPES; ELECTRODES; ELECTRONS; INDUCED CURRENTS; LASER ABLATION; LASER BEAMS; LIGHT EMISSION; OPTIMIZATION; PHOTODIODES; SAMPLING; SPECTRUM ANALYSIS;

INDUCED CURRENT SIGNAL; LASER PROCESSING MONITORING; MICROGAS PLASMA; MOMENT PENETRATION INDICATOR; PRECISE FOCUS INDICATOR; TARGET PLASMA;

LASER PRODUCED PLASMAS;

EID: 2442547843     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.1018     Document Type: Article

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