Low-cost monitoring system for laser processing

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11, 2002, Pages 6411-6412

  Madjid, Syahrun Nur ^a   Kitazima, Iwao ^a   Kagawa, Kiichiro ^a  

^a UNIVERSITY OF FUKUI   (Japan)

Author keywords

Induced current detection; Processed surface observation; Time resolved spatial distribution of microplasma

Indexed keywords

COSTS; ELECTRIC ATTENUATORS; INDUCED CURRENTS; LIGHT REFLECTION; NEODYMIUM LASERS; Q SWITCHED LASERS;

LASER PROCESSING;

LASER ABLATION;

EID: 0036872473     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.6411     Document Type: Article

References (8)

1. T. Kurita, T. Ono and T. Nakai: J. Mater. Process. Tech. 112 (2001) 37.
2. K. Kagawa, T. Manda, M. Ueda and Z. Li: J. Spectrosc. Jpn. 40 (1991) 150.
3. H. Kurniawan, T. Kobayashi, S. Nakajima and K. Kagawa: Jpn. J. Appl. Phys. 31 (1992) 1213.
4. M: Tani, H. Kurniawan, H. Ueda, K. Mizukami, K. Kawai and K. Kagawa: Jpn. J. Appl. Phys. 32 (1993) 3838.
5. H. Kurniawan, T. Kobayashi and K. Kagawa: Appl. Spectrosc. 46 (1992) 581.
6. K. Kagawa, K. Kawai, M. Tani and T. Kobayashi: Appl. Spectrosc. 48 (1994) 198.
7. H. Kurniawan, M. O. Tjia, M. Barmawi, S. Yokoi, Y. Kimura and K. Kagawa: J. Phys. D 28 (1995) 879.
8. S.N. Madjid, H. Kurniawan, I. Kitazima and K. Kagawa: Jpn. J. Appl. Phys. 41 (2002) 3747.