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Volumn 786, Issue , 2003, Pages 9-16
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Ab-initio study on the γ-Al2O3 surfaces and interfaces
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION;
ELECTRONIC STRUCTURE;
MOSFET DEVICES;
PERMITTIVITY;
PROBABILITY DENSITY FUNCTION;
SEMICONDUCTING ALUMINUM COMPOUNDS;
STOICHIOMETRY;
STRUCTURAL ANALYSIS;
THIN FILMS;
ALUMINA FILMS;
ATOMIC LAYER DEPOSITION (ALD);
PYRIDINE;
REAL SURFACES;
ALUMINA;
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EID: 2442482801
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-786-e5.2 Document Type: Conference Paper |
Times cited : (4)
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References (20)
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