Determination of absolute orientation-dependent TiN(0 0 1) and TiN(1 1 1) step energies

Vacuum

Volumn 74, Issue 3-4 SPEC. ISS., 2004, Pages 345-351

  Kodambaka, S ^a   Khare, S V ^a   Petrova, V ^a   Vailionis, A ^a   Petrov, I ^a   Greene, J E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Epitaxial thin films; Ostwald ripening; Scanning tunneling microscopy; Step energies; Surface diffusion; Surface thermodynamics; Titanium nitride

Indexed keywords

ANISOTROPY; CHEMICAL BONDS; DEPOSITION; DIFFUSION; EPITAXIAL GROWTH; FUNCTIONS; SCANNING TUNNELING MICROSCOPY; SURFACE PROPERTIES; THERMODYNAMIC PROPERTIES; THIN FILMS;

EPITAXIAL THIN FILMS; OSTWALD RIPENING; STEP ENERGIES; SURFACE DIFFUSION; SURFACE THERMODYNAMICS;

TITANIUM NITRIDE;

EID: 2442473713     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.015     Document Type: Article

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