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Proceedings of SPIE - The International Society for Optical Engineering
Volumn 5276, Issue , 2004, Pages 92-99
Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication
Author keywords

Aspect ratio; Debris; Excimer laser ablation; Laser plume; Surface roughness
Indexed keywords

ABLATION; ASPECT RATIO; DEBRIS; ELASTOMERS; PLASMAS; POLYMERS; SURFACE ROUGHNESS; THERMAL PLUMES;
EID: 2442462074     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529651     Document Type: Conference Paper
Times cited : (1)
References (10)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.