Iron and molybdenum oxides formation at laser chemical vapor deposition of elements from carbonyls

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5399, Issue , 2004, Pages 171-178

  Mulenko, Sergay A ^a  

^a INSTITUTE OF METAL PHYSICS   (Ukraine)

Author keywords

Deposition; Film; Laser; Oxide; Vapor

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; CARBON; CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; DISSOCIATION; ENERGY DISPERSIVE SPECTROSCOPY; KRYPTON; LASERS; MOLYBDENUM COMPOUNDS; OXIDATION; OXYGEN; RATE CONSTANTS; SILICA;

ATOMIC CONCENTRATION; DISSOCIATION CONSTANTS; LASER RADIATION; VAPOR;

IRON OXIDES;

EID: 2442440713     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.555547     Document Type: Conference Paper

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