Laser-induced formation of semiconductor films based on transition-metal silicides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3822, Issue , 1999, Pages 46-53

  Mulenko, Sergay A ^a   Ovechko, Vladimir S ^a  

^a INSTITUTE OF HYDROBIOLOGY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ENERGY GAP; IRON COMPOUNDS; NEODYMIUM LASERS; SEMICONDUCTING FILMS; SILICON CARBIDE; SUBSTRATES;

LASER CHEMICAL VAPOR DEPOSITION (LCVD);

LASER APPLICATIONS;

EID: 0033345081     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)