Comparison of the structures of evaporated and ion-implanted amorphous silicon samples

Journal of Physics Condensed Matter

Volumn 17, Issue 17, 2005, Pages 2617-2624

  Pusztai, L ^a   Kugler, S ^b  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; EVAPORATION; FUNCTIONS; ION IMPLANTATION; MATHEMATICAL MODELS; MONTE CARLO METHODS;

BOND ANGLES; CORRELATION FUNCTIONS; EVAPORATED MODELS; REVERSE MONTE CARLO MODELING;

AMORPHOUS SILICON;

EID: 24344496950     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/17/17/009     Document Type: Article

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