SCOPUS 정보 검색 플랫폼

Volumn 87, Issue 1, 2005, Pages

Measurements of dioxygen fluoride (O2 F) in an atmospheric pressure plasma jet

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE PLASMA JET (APPJ); DENSITY PROFILE; DIOXYGEN FLUORIDE (O2 F); ULTRAVIOLET ABSORPTION SPECTROSCOPY;

ATMOSPHERIC PRESSURE; DENSITY (OPTICAL); EFFLUENTS; ETCHING; OXYGEN; PLASMA JETS; TANTALUM; ULTRAVIOLET SPECTROSCOPY;

FLUORIDE MINERALS;

EID: 24144461227 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1968420 Document Type: Article

Times cited : (8)

References (13)

1
- 0035730887
- G. S. Selwyn, H. W. Herrmann, J. Park, and I. Henins, Contrib. Plasma Phys. 6, 610 (2001).
- (2001) Contrib. Plasma Phys. , vol.6 , pp. 610
- Selwyn, G.S.¹ Herrmann, H.W.² Park, J.³ Henins, I.⁴

2
- 0000904120
- J. Park, I. Henins, H. W. Herrmann, G. S. Selwyn, J. Y. Jeong, R. F. Hicks, D. Shim, and C. S. Chang, Appl. Phys. Lett. 76, 288 (2000).
- (2000) Appl. Phys. Lett. , vol.76 , pp. 288
- Park, J.¹ Henins, I.² Herrmann, H.W.³ Selwyn, G.S.⁴ Jeong, J.Y.⁵ Hicks, R.F.⁶ Shim, D.⁷ Chang, C.S.⁸

3
- 0001083968
- J. Park, I. Henins, H. W. Herrmann, G. S. Selwyn, and R. F. Hicks, J. Appl. Phys. 89, 20 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 20
- Park, J.¹ Henins, I.² Herrmann, H.W.³ Selwyn, G.S.⁴ Hicks, R.F.⁵

4
- 0034249926
- J. Y. Jeong, J. Park, I. Hernins, S. E. Babayan, V. J. Tu, G. S. Selwyn, G. Ding, and R. F. Hicks, J. Phys. Chem. A 104, 8027 (2000).
- (2000) J. Phys. Chem. A , vol.104 , pp. 8027
- Jeong, J.Y.¹ Park, J.² Hernins, I.³ Babayan, S.E.⁴ Tu, V.J.⁵ Selwyn, G.S.⁶ Ding, G.⁷ Hicks, R.F.⁸

5
- 0000127319
- H. W. Herrmann, I. Henins, J. Park, and G. S. Selwyn, Phys. Plasmas 6, 2284 (1999).
- (1999) Phys. Plasmas , vol.6 , pp. 2284
- Herrmann, H.W.¹ Henins, I.² Park, J.³ Selwyn, G.S.⁴

6
- 33645601785
- LA-UR-03-6689, Los Alamos National Laboratory
- L. A. Rosocha and J. R. FitzPatrick, Report No. LA-UR-03-6689, Los Alamos National Laboratory, 2003.
- (2003)
- Rosocha, L.A.¹ Fitzpatrick, J.R.²

7
- 0003730831
- Wiley, New York
- M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
- (1994) Principles of Plasma Discharges and Materials Processing
- Lieberman, M.A.¹ Lichtenberg, A.J.²

8
- 0042823650
- X. Yang, S. E. Babayan, and R. F. Hicks, Plasma Sources Sci. Technol. 12, 484 (2003).
- (2003) Plasma Sources Sci. Technol. , vol.12 , pp. 484
- Yang, X.¹ Babayan, S.E.² Hicks, R.F.³

9
- 0001709628
- J. L. Lyman and R. Holland, J. Phys. Chem. 92, 7232 (1988).
- (1988) J. Phys. Chem. , vol.92 , pp. 7232
- Lyman, J.L.¹ Holland, R.²

10
- 0001499977
- T. Ellermann, J. Sehested, O. J. Nielsen, P. Pagsberg, and T. J. Wallington, Chem. Phys. Lett. 218, 287 (1994).
- (1994) Chem. Phys. Lett. , vol.218 , pp. 287
- Ellermann, T.¹ Sehested, J.² Nielsen, O.J.³ Pagsberg, P.⁴ Wallington, T.J.⁵

11
- 0003719278
- Wiley, New York
- B. J. Finlayson-Pitts and J. N. Pitts, Atmospheric Chemistry: Fundamentals and Experimental Techniques (Wiley, New York, 1986).
- (1986) Atmospheric Chemistry: Fundamentals and Experimental Techniques
- Finlayson-Pitts, B.J.¹ Pitts, J.N.²

12
- 0034315703
- V. J. Tu, J. Y. Jeong, A. Schutze, S. E. Babayan, G. Ding, G. S. Selwyn, and R. F. Hicks, J. Vac. Sci. Technol. A 18, 2799 (2000).
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2799
- Tu, V.J.¹ Jeong, J.Y.² Schutze, A.³ Babayan, S.E.⁴ Ding, G.⁵ Selwyn, G.S.⁶ Hicks, R.F.⁷

13
- 33645590421
- Y. Kim, H. L. Teslow, J. Park, L. A. Rosocha, and H. W. Herrmann, J. Adv. Oxid. Technol. (in press).
- J. Adv. Oxid. Technol.
- Kim, Y.¹ Teslow, H.L.² Park, J.³ Rosocha, L.A.⁴ Herrmann, H.W.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.