Surface acoustic wave band gaps in micro-machined air/silicon phononic structures - Theoretical calculation and experiment

Zeitschrift fur Kristallographie

Volumn 220, Issue 9-10, 2005, Pages 841-847

  Wu, Tsung Tsong ^a   Huang, Zi Gui ^a   Liu, Shih Yang ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Layered SAW (Surface acoustic wave) device; MEMS (Micro electro mechanical systems); Phononic crystal; SAW (Surface acoustic wave)

Indexed keywords

EID: 24044530097     PISSN: 00442968     EISSN: None     Source Type: Journal    
DOI: 10.1524/zkri.2005.220.9-10.841     Document Type: Article

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