Investigations of the capillary effect for gripping silicon chips

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 194-203

  Grutzeck, H ^a  

^a NONE   (Germany)

Author keywords

Capillary effect; Micro gripper; Surface tension

Indexed keywords

BIOSENSORS; DIFFERENTIAL EQUATIONS; ESTIMATION; ETCHING; MICROSTRUCTURE; SILICON; SURFACE TENSION;

CAPILLARY EFFECTS; MICRO GRIPPER; MICROSYSTEMS; SILICON CHIPS;

MICROPROCESSOR CHIPS;

EID: 24044471343     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0467-3     Document Type: Article

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