Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

Advanced Metallization Conference (AMC)

Volumn , Issue , 2004, Pages 457-462

  Abell, Thomas ^a   Iacopi, Francesca ^a   Prokopowicz, Greg ^b   Sun, Brad ^c   Mazurenko, Alex ^d   Travaly, Youssef ^a   Baklanov, Mikhail ^a   Jonas, Alain ^e   Sullivan, Chris ^b   Brongersma, Sywert ^a   Liou, Huey Chiang ^c   Tower, Joshua ^d   Gostein, Michael ^d   Gallagher, Mike ^b   Calvert, Jeff ^b   Moinpour, Mansour ^c   Maex, Karen ^a  

^a IMEC   (Belgium)

^b ROHM AND HAAS COMPANY   (United States)

^c INTEL CORPORATION   (United States)

^d PHILIPS RESEARCH LABORATORIES   (Germany)

^e UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRIC POROSIMETRY (EP); POROGEN; SURFACE ACOUSTIC WAVE SPECTROSCOPY (SAWS); X-RAY REFLECTOMETRY (XRR);

ACOUSTIC WAVES; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ELASTIC MODULI; ELLIPSOMETRY; INDENTATION; LIGHT REFLECTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SPECTROSCOPIC ANALYSIS; SURFACE WAVES; X RAYS;

DIELECTRIC FILMS;

EID: 23844554520     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. International Technology Roadmap for Semiconductors, Interconnect, 2003 Edition.
2. A.A.Maznev, A.Mazurenko, Z.Li, M.Gostein, Rev.Scientific.Instr 74 666 (2003)
3. K.P.Mogilnikov, M.R.Baklanov, Electrochem Solid St. 5 (12): F29-F31 (2002)
4. nd ed (Cambridge University Press, New York, 1997)
5. A.Jain, S.Rogojevic, W.N.Gill, J.L.Plawsky, I.Matthew, M.Tomozawa, J.Appl.Phys. 90, 5832 (2001)