Micropatterning of inorganic film by laser-induced pyrolysis using organometallic precursor

Materials Research Society Symposium Proceedings

Volumn EXS, Issue 2, 2004, Pages 183-185

  Watanabe, Akira ^a   Tanase, Tomokazu ^a   Kobayashi, Yoshio ^a   Konno, Mikio ^a   Yamada, Shinji ^b   Miwa, Takao ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTAL STRUCTURE; DIELECTRIC MATERIALS; DYNAMIC RANDOM ACCESS STORAGE; ELECTRONIC EQUIPMENT; FERROELECTRICITY; ORGANOMETALLICS; PHOTOLITHOGRAPHY; PYROLYSIS; RAMAN SPECTROSCOPY; SOL-GELS; SPIN COATING;

LASER-INDUCED PYROLYSIS (LIP); LEAD ZIRCONATE TITANATE (PZT); MICRO-RAMAN SPECTROSCOPY; ORGANOMETALLIC PRECURSOR;

THIN FILMS;

EID: 23844526930     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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