Low temperature processing of crystalline lead zirconate titanate (PZT) film and the direct micropatterning by laser-induced pyrolysis of a sol-gel-derived film

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 7 B, 2003, Pages

  Watanabe, Akira ^a   Tanase, Tomokazu ^a   Kobayashi, Yoshio ^a   Konno, Mikio ^a   Yamada, Shinji ^b   Miwa, Takao ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Laser induced pyrolysis; Lead zirconate titanate; Low temperature processing; Micro Raman spectroscopy; Micropattering; Sol gel

Indexed keywords

COMPLEXATION; CRYSTALLINE MATERIALS; LASER APPLICATIONS; LOW TEMPERATURE EFFECTS; MULTILAYERS; ORGANIC ACIDS; PYROLYSIS; RAMAN SPECTROSCOPY; SPIN COATING; THIN FILMS;

DIRECT MICROPATTERNING; LASER INDUCED PYROLYSIS; LEAD ZIRCONATE TITANATE FILM; SOL-GEL DERIVED FILMS;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 0141831094     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l843     Document Type: Letter

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