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Volumn 5745, Issue II, 2005, Pages 1146-1154

The structure and physical properties of ultra-thin, multi-element Si pin photodiode arrays for medical imaging applications

Author keywords

Crosstalk; Pin photodiode array; Quantum efficiency; Silicon photodiode; Tileable array; Ultra thin die

Indexed keywords

PIN PHOTODIODE ARRAYS; SILICON PHOTODIODES; TILEABLE ARRAY; ULTRA THIN DIE;

EID: 23844517755     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.595414     Document Type: Conference Paper
Times cited : (9)

References (8)
  • 1
    • 0001323203 scopus 로고    scopus 로고
    • Development of low noise, back-side illuminated silicon photodiode arrays
    • S.E. Holland, N.W. Wang, W.W. Moses, "Development of low noise, back-side illuminated silicon photodiode arrays, IEEE TRANS NUC SCI, 44, 443-447, 1997.
    • (1997) IEEE Trans Nuc Sci , vol.44 , pp. 443-447
    • Holland, S.E.1    Wang, N.W.2    Moses, W.W.3
  • 2
    • 0042377120 scopus 로고    scopus 로고
    • Back-illuminated photodiodes for multislice CT
    • 15-20 February , San Diego, California, USA
    • R.P. Luhta, R.A.Mattson, N. Taneja, P. Bui, R.Vasbo, "Back- illuminated photodiodes for multislice CT". SPIE Proceedings, 15-20 February 2003, San Diego, California, USA.
    • (2003) SPIE Proceedings
    • Luhta, R.P.1    Mattson, R.A.2    Taneja, N.3    Bui, P.4    Vasbo, R.5
  • 5
    • 84860986673 scopus 로고    scopus 로고
    • United States Patent No. 6,672,4735 B1, "Ultra thin back illuminated photodiode array structures and fabrication methods", Semicoa, Costa Mesa, CA (US), M 13
    • United States Patent No. 6,672,4735 B1, Goushcha et al., "Ultra thin back illuminated photodiode array structures and fabrication methods", Semicoa, Costa Mesa, CA (US), M 13, 2004.
    • (2004)
    • Goushcha1
  • 6
    • 3543097464 scopus 로고    scopus 로고
    • Ultra-thin, two dimensional, multi-element Si pin photodiode array for multipurpose applications
    • Semiconductor Photodetectors 2004 (SPIE Bellingham, WA)
    • R.A. Metzler, A.O. Goushcha, C. Hicks, and E. Bartley, "Ultra-thin, two dimensional, multi-element Si pin photodiode array for multipurpose applications". In Semiconductor Photodetectors 2004, Proceedings of SPIE, 5353 (SPIE Bellingham, WA, 2004), 117-125.
    • (2004) Proceedings of SPIE , vol.5353 , pp. 117-125
    • Metzler, R.A.1    Goushcha, A.O.2    Hicks, C.3    Bartley, E.4
  • 7
    • 3042635454 scopus 로고    scopus 로고
    • Multi-element, two dimensional Si pin photodiode array fabricated on a single 30-um thickness die
    • Medical Imaging 2004: Physics of Medical Imaging (SPIE Bellingham, WA)
    • A.O. Goushcha, R.A. Metzler, A.J. Popp, E. Bartley, and C. Hicks, "Multi-element, two dimensional Si pin photodiode array fabricated on a single 30-um thickness die". In Medical Imaging 2004: Physics of Medical Imaging, Proceedings of SPIE, 5368 (SPIE Bellingham, WA, 2004) 586-596.
    • (2004) Proceedings of SPIE , vol.5368 , pp. 586-596
    • Goushcha, A.O.1    Metzler, R.A.2    Popp, A.J.3    Bartley, E.4    Hicks, C.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.