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Volumn 34, Issue 1-3, 2005, Pages 79-82

Fabrication and structural characterization of TiO nanoparticle soft-landed on substrate by the magnetron sputtering-gas aggregation method

(8) Tanemura, S a Kajino, K a Miao, L a Koide, S a Tanemura, M a Toh, S b Kaneko, K b Mori, M c

a NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

b KYUSHU UNIVERSITY (Japan)

c NGK INSULATORS LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; AMORPHOUS FILMS; FABRICATION; FILM GROWTH; SUBSTRATES; THIN FILMS;

AGGREGATION METHODS; COMPOUND MATERIAL; GAS AGGREGATION; MAGNETRON-SPUTTERING; NANO-CRYSTALLITES; PARTICLE CLUSTERS; SMALL PARTICLES; SPUTTERING GAS; STRUCTURAL CHARACTERIZATION; THIN-FILMS;

MAGNETRON SPUTTERING;

EID: 23744516998 PISSN: 14346060 EISSN: 14346079 Source Type: Journal
DOI: 10.1140/epjd/e2005-00123-8 Document Type: Conference Paper

Times cited : (7)

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