Laser-based microprocesses using diffraction-free beams generated by diffractive axicons

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5713, Issue , 2005, Pages 497-507

  Amako, Jun ^a   Yoshimura, Kazuto ^a   Sawaki, Daisuke ^a   Shimoda, Tatsuya ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

Depth of focus; Diffraction free beam; Diffractive axicon; Hybridized process; Laser processing

Indexed keywords

DIFFRACTION; ENERGY EFFICIENCY; ETCHING; GLASS; LASER PULSES; METALLIC FILMS; MICROPROCESSOR CHIPS; SOLUTIONS;

DEPTH OF FOCUS; DIFFRACTION-FREE BEAM; DIFFRACTIVE AXICON; HYBRIDIZED PROCESS; LASER PROCESSING;

LASERS;

EID: 23744477366     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.585135     Document Type: Conference Paper

References (16)

1. J. Amako, T. Shimoda and K. Umetsu, "Versatile light-control schemes based on diffractive optics for laser drilling, cutting, and joining technologies for microelectronic and micromechanical components and devices," Photon Processing in Microelectronics and Photonics, Proc. SPIE Vol.5339, pp.475-487 (2004).
2. G. Scott and N. McArdle, "Efficient generation of nearly diffraction-free beams using an axicon," Opt. Eng. 31, 2640-2643 (1992).
3. J. A. Davis, J. Guertin, and D. M. Cottrell, "Diffraction-free beams generated with programmable spatial light modulator," Appl. Opt. 32, 6368-6370 (1993).
4. J. Arlt, V. G. Chavez, W. sibbett and K. Dholakia, "Optical micro manipulation using a Bessel light beam," Opt. Commun. 197, 239-245 (2001).
5. J. Durnin, "Exact solutions for nondiffracting beams," J. Opt. Soc. Am. A 4, 651-654 (1987).
6. G. Indebetouw, "Nondiffracting optical fields: some remarks on their analysis and synthesis," J. Opt. Soc. Am. A 6, 150-152 (1989).
7. M. E. J. Friese, J. Enger, H. Rubinsztein-Dunlop, and N. R. Heckenberg, "Optical angular-momentum transfer to trapped absorbing particles," Phys. Rev. 54, 1593-1596 (1996).
8. J. Arlt. T. Hitomi, and K. Dholakia, "Atom guiding along Laguerre-Gaussian and Bessel light beams," Appl. Phys. B 71, 549-554 (2000).
9. J. Amako, D. Sawaki, and E. Fujii, "Microstructuring transparent materials using nondiffracting ultrashort pulse beams generated by diffractive optics," J. Opt. Soc. Am. B 20, 2562-2568 (2003).
10. J. Turunen, A. Vasara, and A. T. Friberg, "Holographic generation of diffraction-free beams," Appl. Opt. 27, 3959-3962 (1988).
11. J. Amako, K. Nagasaka, and E. Fujii, "Direct laser-writing of diffractive array illuminators operable at two wavelengths," Optical Engineering for Sensing and Nanotechnology, Proc. SPIE Vol.4416, pp.360-363 (2001).
12. T. Tanaka and S. Yamamoto, "Comparison of aberration between axicon and lens," Opt. Commun. 184, 113-118 (2000).
13. A. Marcinkevicius, S. Juodkazis, S. Matsudo, V. Mizeikis and H. Misawa, "Application of Bessel beams for microfabrication of dielectric by femtosecond laser," Jpn. J. Appl. Phy. 40, L1197-L1199 (2001).
14. 2 with pulse widths from 7 ns to 150 fs," Appl. Phys. Lett. 64, 3071-3073 (1994).
15. D. Ashkenasi, H. Varel, A. Rosenfeld, S. Henz, J. Herrmann, and E. E. B. Cambell, "Application of self-focusing of ps laser pulses for three-dimensional microstructuring of transparent materials," Appl. Phys. Lett. 72, 1442-1444 (1998).
16. J. Amako, K. Nishida, and K. Nagasaka, "Chromatic-distortion compensation in splitting and focusing of femtosecond pulses by use of a pair of diffractive optical elements," Opt. Lett. 5, 83-85 (2002).