Versatile light-control schemes based on diffractive optics for laser drilling, cutting and joining technologies for microelectronic and micromechanical components and devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 475-487

  Amako, Jun ^a   Shimoda, Tatsuya ^a   Umetsu, Kazushige ^a  

^a SEIKO EPSON CORPORATION   (Japan)

Author keywords

Beam control; Diffractive optics; Laser processing; Wavefront modulation

Indexed keywords

DIFFRACTION GRATINGS; INFRARED RADIATION; LASER BEAM CUTTING; LIGHTING; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; OPTICAL INSTRUMENT LENSES; QUARTZ; REFRACTIVE INDEX; SOLDERING; ULTRAVIOLET RADIATION; VACUUM PUMPS;

BEAM CONTROL; LASER PROCESSING; MINIATURIZATION; WAVEFRONT MODULATION;

DIFFRACTIVE OPTICS;

EID: 5444221896     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.527853     Document Type: Conference Paper

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