Method and experimental study for diffractive/refractive micro-optical elements with continuous profile

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4924, Issue , 2002, Pages 61-68

  Du, Chunlei ^a   Dong, Xiaochun ^a   Zhou, Chongxi ^a   Qiu, Chuankai ^a   Pan, Li ^a   Deng, Qiling ^a   Liu, Yinhui ^a   Chen, Bo ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

Mask moving method; Micro optical clement; Microlens profile control

Indexed keywords

HOLOGRAPHY; NUMERICAL METHODS; OPTICAL INSTRUMENT LENSES;

CONTINUOUS PROFILE; MICRO-OPTICAL CLEMENT; MICRO-OPTICAL ELEMENTS; NUMERICAL APERTURE; PHOTOSENSITIVE MATERIALS; PROCESSING TECHNIQUE; PROFILE CONTROL; REFRACTIVE MICROLENS ARRAYS;

MICROLENSES;

EID: 2342659924     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.481501     Document Type: Conference Paper

References (8)

1. Lurong Guo, Bo Chen, Lin Pang, Chunlei Du et al.," Novel method for fabricating microlens array", Vol. 3099, pp. 99-106, 1997.
2. Reinhard Volkel, Hans Peter Herzig, P. Nussbaum etal, "Microlens array image system for photolithography", OptEng., Vol. 35, No 11, pp.3323-3330, 1996.
3. Chunlei Du, Bo Chen, Chuankai Qiu, et al, "microlens array and the application systems", SPIE Vol. 4231, pp. 153-158, 2000.
4. Michael T. Gale, M. Rossi, J. Pederson, Helmt Schutz," Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists", Opt. Eng., Vol. 33, No. 11, pp.3556-3566, 1994.
5. D. Daly, R.F. Stevens, M.C. Hutly, "Manufacture of microlenses by melting photoresist", Meas.Sci.Tech., Vol. 1, pp323-326, 1998.
6. J.W. Goodman, Introductionto Fourier Optics, McGRAW-Hill, 1968.
7. Kenro Miyamoto, "The phase Fresnel Lens", JOSA, Vol. 51, No. 1 pp.17-20, 1961.
8. R.E. Kunz, M. Rossi, "Phase matched Fresnel elements", Optics communications, Vol. 97, No. 12, pp.6-9, 1994.