Titanium-containing glass for laser micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 124-128

  Shojiya, Masanori ^a   Koyo, Hirotaka ^a   Tsunetomo, Keiji ^a  

^a NIPPON SHEET GLASS CO LTD   (Japan)

Author keywords

Excimer laser; Laser ablation; Machinable glass; Micro hole array; Nd:YAG laser; Titanium

Indexed keywords

ELECTROMAGNETIC WAVE ABSORPTION; EXCIMER LASERS; HARMONIC ANALYSIS; IRRADIATION; LASER ABLATION; MICROMACHINING; NEODYMIUM LASERS; OPTICS; TITANIUM;

LASER DRILLING; MACHINABLE GLASS; MICRO-HOLE ARRAY;

GLASS;

EID: 2342614251     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540722     Document Type: Conference Paper

References (4)

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3. T. Koyama, K. Tsunetomo, K. Kamada, and K. Nakama: Proc. 2th Int. Symp. on Laser Precision Microfabrication, Singapore, 2001, pp.162.
4. K-H. Sun, J. Am. Ceram. Soc., 30, (1947) 277.