Laser-micromachining for Ag ion exchanged glasses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 162-165

  Koyama, Tadashi ^a   Tsunetomo, Keiji ^a   Kamada, Kenji ^a   Nakama, Kenichi ^a  

^a NIPPON SHEET GLASS CO LTD   (Japan)

Author keywords

Ag containing glass; Ion exchange; KrF excimer laser; Micro hole array; Optical interconnection; Ti:Al2O3 laser; V grooves

Indexed keywords

EXCIMER LASERS; GLASS; ION EXCHANGE; LASER BEAM CUTTING;

LASER-MICROMACHINING;

LASER BEAM EFFECTS;

EID: 0036383151     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456857     Document Type: Conference Paper

References (2)

1. T. Koyama and K. Tsunetomo, Jpn. Appl. Phys. 36 (1997) L224.
2. K. Tsunetomo and T. Koyama, Opt. Lett. 22 (1997) 411.