The spatial and energy response of a 3d architecture silicon detector measured with a synchrotron X-ray microbeam

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 524, Issue 1-3, 2004, Pages 236-244

  Morse, John ^a,d   Kenney, Christopher J ^a   Westbrook, Edwin M ^a   Naday, Istvan ^b   Parker, Sherwood I ^c  

^a Molecular Biology Consortium   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF HAWAII   (United States)

^d EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

3D; Detector; Silicon; X ray

Indexed keywords

AMPLIFIERS (ELECTRONIC); CHARGE CARRIERS; CRYSTALLOGRAPHY; ELECTRODES; POLYSILICON; SAMPLING; SILICON WAFERS; SYNCHROTRON RADIATION; X RAYS;

3D; CHARGE SPLITTING; PIXEL CELLS; SPATIAL RESPONSE; X RAY MICROBEAMS;

SEMICONDUCTOR DEVICES;

EID: 2342611180     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2004.01.058     Document Type: Article

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