Low temperature growth of epitaxial complex oxide films by an excimer laser MOD process

Materials Science and Engineering: B

Volumn 109, Issue 1-3, 2004, Pages 131-135

  Tsuchiya, T ^a   Yamaguchi, I ^a   Manabe, T ^a   Kumagai, T ^a   Mizuta, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

ArF excimer laser; Epitaxial growth; LSMO; MOD; PZT

Indexed keywords

CRYSTALLIZATION; EXCIMER LASERS; HEAT TREATMENT; IRRADIATION; METALLORGANIC VAPOR PHASE EPITAXY; X RAY DIFFRACTION ANALYSIS;

COMPLEX OXIDE FILMS; LSMO; PZT;

THIN FILMS;

EID: 2342588723     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2003.10.064     Document Type: Conference Paper

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