Modeling and simulation of a high frequency MEMS-fabricated ultrasonic nozzle

Materials Research Society Symposium - Proceedings

Volumn 729, Issue , 2002, Pages 221-227

  Tsai, S C ^a   Tseng, T K ^b   Song, Y L ^b   Chou, Y F ^c   Tsai, C S ^b,d   Chang, P Z ^e  

^a CALIFORNIA STATE UNIVERSITY   (United States)

^b ACADEMIA SINICA   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZATION; COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NOZZLES; PRESSURE EFFECTS; PYROLYSIS; SYNTHESIS (CHEMICAL); ULTRASONIC DEVICES;

AMBIENT PRESSURE; SPRAY PYROLYSIS; ULTRASONIC ATOMIZATION; ULTRASONIC NOZZLE;

SILICON;

EID: 0036929302     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-729-u5.3     Document Type: Conference Paper

References (8)

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