Camera for thermal imaging of semiconductor devices based on thermoreflectance

Annual IEEE Semiconductor Thermal Measurement and Management Symposium

Volumn 20, Issue , 2004, Pages 87-91

  Christofferson, James ^a   Shakouri, Ali ^a  

^a University of California Santa Cruz   (United States)

Author keywords

Photothermal Imaging; Thermal Imaging; Thermoreflectance

Indexed keywords

PHOTOTHERMAL IMAGING; SPATIAL RESOLUTION; SURFACE TEMPERATURE; THERMOREFLECTANCE;

ANALOG TO DIGITAL CONVERSION; CAMERAS; CHARGE COUPLED DEVICES; COOLING; FAST FOURIER TRANSFORMS; INFRARED IMAGING; LIGHT AMPLIFIERS; LIGHT REFLECTION; PHOTODIODES; SEMICONDUCTING SILICON COMPOUNDS; THERMOCOUPLES; THERMODYNAMICS;

SEMICONDUCTOR DEVICES;

EID: 2342573508     PISSN: 10652221     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. A. Cutolo, "Selected contactless optoelectronic measurements for electronic applications," Review of Scientific Instruments, vol. 69, pp. 337-60, 1998.
2. W. Claeys, S. Dilhaire, V. Quintard, J. P. Dom, and Y. Danto, "Thermoreflectance optical test probe for the measurement of current-induced temperature changes in microelectronic components,", 1993.
3. S. Grauby, B. C. Forget, S. Hole, and D. Fournier, "High resolution photothermal imaging of high frequency phenomena using a visible charge coupled device camera associated with a multichannel lock-in scheme," Review of Scientific Instruments, vol. 70, pp. 3603-8, 1999.
4. Christofferson, J.; Vashaee, D.; Shakouri, A.; Melese, P. "Real time sub-micron thermal imaging using thermoreflectance," International Mechanical Engineering Congress and Exhibition (IMECE 2001), New York, NY, Nov. 2001.